Shandong modern marine industry technology innovation center Weifang Industrial Design Center Weifang Enterprise Technology Center Weifang One Enterprise One Technology Research and Development Center Shandong Inorganic Silicide Engineering Laboratory Academician Workstation Shandong Enterprise Technology Center Shandong One Enterprise One Technology Research Center Weifang Key Laboratory Weifang Inorganic Silicide Engineering Laboratory Weifang Engineering Technology Research Center patent for invention